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Current Areas of Research


  • Chemical Vapor Deposition of Diamond materials- from nanocrystalline thin films for MEMS and electronics, to doped single crystal epilayers for advanced electronics. Deposition conditions, surface reactivity, precursor decomposition mechanism, precursor adsorption/desorption, and nature of
    different ligands are some of the factors studied for their influence on the aforementioned thin film properties.

  • Surface studies of diamond.

  • Infrared Reflection Absorption Spectroscopy (IRRAS) of Surface Species.

  • Plasma Chemistry/Diagnostics.

  • Spectroscopy of Transient and Reactive Species.

  • Micro Raman, Photoluminence, and Cathodoluminescence Spectroscopy.

  • Electronic properties and electron emission from wide band-gap materials

  • Synthesis of precursors for chemical vapor deposition and spatially selective chemical vapor deposition.

  • Fabrication of micro and nanostructures by chemical-assisted in-beam etching process

  • MEMS and NEMS resonator and device fabrication.
 
   
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