TitleWet-Chemical Treatment of Si3N4 Surfaces Studied Using Infrared Attenuated Total Reflection Spectroscopy
Publication TypeJournal Article
Year of Publication2005
AuthorsBermudez VM
JournalJournal of the Electrochemical Society
Volume152
Issue2
PaginationF31-F36
Publication Release Number

04-1221.1-0634

Full Text