Dr. Elizabeth A. Dobisz, an electronics
engineer at the Naval Research Laboratory (NRL), has been awarded
the National Women in Science in Engineering Award for Scientific
Achievement. She received the award on April 17, 2000 at the
National Women in Science and Engineering conference in Palm
Harbor, FL. Dr. Dobisz works in the Electronics Science and Technology
Division at NRL.
Dr. Dobisz received her B.S.
and M.Eng. degrees in Engineering Physics from Cornell University
and her M.S. and Ph.D. degrees in Materials Science from the
University of Wisconsin. From 1985-1987, she worked as a post
doctoral associate at Bell Communications Research on nanofabrication
and properties of patterned III-V semiconductors. In 1987, she
joined the newly formed Nanoelectronics Program at NRL, where
she focused on the resolution limits of nanofabrication, using
high resolution e-beam lithography, proximal probe lithography,
reactive ion etching, ion implantation, and compositional intermixing
of superlattices. She has authored over 75 publications in her
field.
At NRL, under the DARPA Lithography
Program, Dr. Dobisz performed pioneering work in e-beam nanolithography
in the new state-of-the-art chemically amplified resists. Her
work focused on maximizing resolution through minimization of
proximity effects and optimization of diffusion-reaction kinetics
in the resists. Dr. Dobisz, with her co-author Dr. Christie Marrian,
provided the first experimental demonstration of the elimination
of e-beam proximity effects through the use of low energy electrons
with scanning tunneling microscope (STM) lithography. The work
was fundamental to the initiation of research and development
programs in proximal probe lithography and low voltage e-beam
columns at IBM, Stanford, ETEC, and DARPA. Together with colleagues
Drs. Christie Marrian and Eric Snow, she filed a 1996 NRL Edison
Award winning patent on conducting tip AFM lithography. In 1994
Dr. Dobisz, won an Alan Berman Award, with Drs. Charles Eddy,
Craig Hoffman, and Jerry Meyers, for patterning nanostructures
in mercury-cadmium telluride. Dr. Dobisz is currently the principal
investigator on a DARPA program for anti-charging layers for
e-beam lithography and resists for low voltage e-beam micro-columns,
both based upon self- assembled monolayers (SAMs). The work is
performed with members of NRL's Center for Biomolecular Science
and Engineering, ETEC-Applied Materials, and Shipley
Corporation.
Dr. Dobisz served as Task Area
Coordinator from 1992-1999 for the E-Beam Lithography, Resists,
and Absorbers Task Area in NRL's in-house research program under
the DARPA Advanced Lithography Program. On the DARPA programs
she has served as a DOD technical representative and was a member
of the DARPA X-Ray Lithography Program Steering Committee. She
served on the DARPA/SEMATECH Mask Standards Advisory Committee,
1992-1994, and on the DoD Working Group on Lithography, chaired
by Deputy Under Secretary of Defense, Kenneth Flamm, 1993-1994.
By national election, Dr. Dobisz
was appointed to the Board of Directors of the American Vacuum
Society for a two-year term, 1998-1999. In the AVS, she has also
served as national symposium Vice-Chair in 1997; Journal of Vacuum
Science and Technology, Associate Editor, 1994-96; and is currently
chair of the Web Committee. In the Silicon Valley lithography
community, she is serving as program chair of the SPIE Symposia
on Emerging Lithographies for Manufacturing in 2000 and 2001.
Previously she had served as program committee Vice Chair in
1999, and program committee member 1991-1998. For the International
Conference on Electron, Ion, and Photon Beam Technology and
Nanofabrication,
Dr. Dobisz has served as a Section Head since 1994 in the areas
of nanofabrication and resists.
Dr. Dobisz is currently chair
of NRL's Women in Science and Engineering Network (WISE-Net).
Previously she has served as Vice-Chair and as Secretary of the
NRL WISE-Net. In her role as Vice Chair and Chair, she initiated
the NRL WISE participation in the Greater Washington Area Girl
Scout Council Day at the Air and Space Museum. She is currently
participating in a federal agency workshop organized by the National
Research Council Committee on Women in Science and Engineering.
Dr. Dobisz has encouraged young girls in science through her
involvement in activities with her daughter. She has given presentations
to her daughter's Girl Scout troop and elementary school, and
organized a Girl Scout trip to the Science Center in
Baltimore.
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