Method of Making Curved Charge-Coupled Device
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Description:The Naval Research Laboratory (NRL) has developed a method of making a curved charge-coupled device (CCD) for use in large field of view applications. The new method and CCD overcome the breakage problems due to mechanical bending of thinned CCDs. Using standard silicon fabrication methods, the novel NRL method uses 3D gray tone lithography and plasma etching to shape the silicon holding the CCD. The NRL method forms a simple CCD without mechanical manipulation, thus forming a CCD with a large field of view. The NRL method in turn enables multi-spectral ultra-sensitive imaging necessary for large and very large telescope applications. The NRL CCD is also ideal for large telescopes involving infrared image acquisition and spectroscopy, conducted over wide fields of view.
- Simple lens configuration
- Large field of view
- No mechanical failure due to bending and mechanical manipulation
- Uses standard silicon procession techniques
- Large-field-of-view compact cameras
- Radiation detectors
- "Curved Radiation Detector," Proceedings of the 2008 IEEE Nuclear Science Symposium ISBN: 978-4244-2715-4, ISSN: 1082-3654.
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Contact:Naval Research Laboratory
Technology Transfer Office, Code 1004