TitleThin A12O3-TiO2 Nanolaminates: An investigation of Atomic Layer Deposited Hybrid Oxides for Gate Dieletrric Applications
Publication TypeJournal Article
Year of Publication2012
AuthorsDowney B, Meyer DJ, Bass R, Katzer DS, Binari SC
JournalJournal of Vacuum Science & Technology B
Volume30
Publication Release Number

12-1231-1253