TitleEpitaxial Growth of Cubic and Hexagonal InN Thin Films via Plasma-Assisted Atomic Layer Epitaxy
Publication TypeConference Paper
Year of Publication2013
AuthorsGuo L, Xia L, John BBoos, Bennett B, Ancona M, del Alamo JA
Conference NameMicrosystems Annual Research Conference (MARC)
Date Published01/2013
Conference LocationCambridge, Mass.
Publication Release Number

12-1231-4269