| Title | 40 nm T-gate Process Development using ZEP Reflow |
| Publication Type | Conference Paper |
| Year of Publication | 2012 |
| Authors | Meyer D, Downey B, Bass R, Katzer DS, Binari SC |
| Conference Name | 2012 International Conference on Compound Semiconductor Manufacturing Technology |
| Date Published | 04/2012 |
| Conference Location | Boston, MA |
| Publication Release Number | 12-1231-1313 |
