Title | 40 nm T-gate Process Development using ZEP Reflow |
Publication Type | Conference Paper |
Year of Publication | 2012 |
Authors | Meyer D, Downey B, Bass R, Katzer DS, Binari SC |
Conference Name | 2012 International Conference on Compound Semiconductor Manufacturing Technology |
Date Published | 04/2012 |
Conference Location | Boston, MA |
Publication Release Number | 12-1231-1313 |