TitleEmbedded Monofilament UV-LIGA Techniques for Microfabrication of Bean Tunnels in a 220 GHz Wideband Serpentine Waveguide Amplifier
Publication TypeConference Paper
Year of Publication2012
AuthorsPetillo J, Kostas C, Panagos D, Ovtchinnikov S, Burke A, Antonsen T, Wright E, Nguyen K, Nelson E, Held B, DeFord J, Jensen K, Pasour J, Levush B, Ludeking L
Conference Name 2012 IEEE 13th International Vacuum Electronics Conference, IVEC 2012
PublisherIEEE
Publication Release Number

12-1231-0804