TitleAtomic layer Deposition of Al2O3 on GaSb Using an In Situ Hydrogen Plasma Pretreatment
Publication TypeConference Proceedings
Year of Publication2013
AuthorsRuppalt LB, Cleveland E, Champlain J, Prokes S, John BBoos, Park D, Bennett B
Conference Name73rd AVS Physical Electronics Conference
Date Published06/2013
Conference LocationRaleigh, NC
Publication Release Number

13-1231-1371