Dr. Elizabeth Dobisz Wins National WISE Award

5/25/2000 - 24-00r
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Dr. Elizabeth A. Dobisz, an electronics engineer at the Naval Research Laboratory (NRL), has been awarded the National Women in Science in Engineering Award for Scientific Achievement. She received the award on April 17, 2000 at the National Women in Science and Engineering conference in Palm Harbor, FL. Dr. Dobisz works in the Electronics Science and Technology Division at NRL.

Dr. Dobisz received her B.S. and M.Eng. degrees in Engineering Physics from Cornell University and her M.S. and Ph.D. degrees in Materials Science from the University of Wisconsin. From 1985-1987, she worked as a post doctoral associate at Bell Communications Research on nanofabrication and properties of patterned III-V semiconductors. In 1987, she joined the newly formed Nanoelectronics Program at NRL, where she focused on the resolution limits of nanofabrication, using high resolution e-beam lithography, proximal probe lithography, reactive ion etching, ion implantation, and compositional intermixing of superlattices. She has authored over 75 publications in her field.

At NRL, under the DARPA Lithography Program, Dr. Dobisz performed pioneering work in e-beam nanolithography in the new state-of-the-art chemically amplified resists. Her work focused on maximizing resolution through minimization of proximity effects and optimization of diffusion-reaction kinetics in the resists. Dr. Dobisz, with her co-author Dr. Christie Marrian, provided the first experimental demonstration of the elimination of e-beam proximity effects through the use of low energy electrons with scanning tunneling microscope (STM) lithography. The work was fundamental to the initiation of research and development programs in proximal probe lithography and low voltage e-beam columns at IBM, Stanford, ETEC, and DARPA. Together with colleagues Drs. Christie Marrian and Eric Snow, she filed a 1996 NRL Edison Award winning patent on conducting tip AFM lithography. In 1994 Dr. Dobisz, won an Alan Berman Award, with Drs. Charles Eddy, Craig Hoffman, and Jerry Meyers, for patterning nanostructures in mercury-cadmium telluride. Dr. Dobisz is currently the principal investigator on a DARPA program for anti-charging layers for e-beam lithography and resists for low voltage e-beam micro-columns, both based upon self- assembled monolayers (SAMs). The work is performed with members of NRL's Center for Biomolecular Science and Engineering, ETEC-Applied Materials, and Shipley Corporation.

Dr. Dobisz served as Task Area Coordinator from 1992-1999 for the E-Beam Lithography, Resists, and Absorbers Task Area in NRL's in-house research program under the DARPA Advanced Lithography Program. On the DARPA programs she has served as a DOD technical representative and was a member of the DARPA X-Ray Lithography Program Steering Committee. She served on the DARPA/SEMATECH Mask Standards Advisory Committee, 1992-1994, and on the DoD Working Group on Lithography, chaired by Deputy Under Secretary of Defense, Kenneth Flamm, 1993-1994.

By national election, Dr. Dobisz was appointed to the Board of Directors of the American Vacuum Society for a two-year term, 1998-1999. In the AVS, she has also served as national symposium Vice-Chair in 1997; Journal of Vacuum Science and Technology, Associate Editor, 1994-96; and is currently chair of the Web Committee. In the Silicon Valley lithography community, she is serving as program chair of the SPIE Symposia on Emerging Lithographies for Manufacturing in 2000 and 2001. Previously she had served as program committee Vice Chair in 1999, and program committee member 1991-1998. For the International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication, Dr. Dobisz has served as a Section Head since 1994 in the areas of nanofabrication and resists.

Dr. Dobisz is currently chair of NRL's Women in Science and Engineering Network (WISE-Net). Previously she has served as Vice-Chair and as Secretary of the NRL WISE-Net. In her role as Vice Chair and Chair, she initiated the NRL WISE participation in the Greater Washington Area Girl Scout Council Day at the Air and Space Museum. She is currently participating in a federal agency workshop organized by the National Research Council Committee on Women in Science and Engineering. Dr. Dobisz has encouraged young girls in science through her involvement in activities with her daughter. She has given presentations to her daughter's Girl Scout troop and elementary school, and organized a Girl Scout trip to the Science Center in Baltimore.

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