NRL has a broad portfolio of technologies and over 1300 active patents or patent applications that are available for license. Below is a list of links to more information for a number of NRL technologies that have potential commercial applications.

Improved Growth Method for III-V Nitride Devices

NRL has developed a materials growth method that results in significantly improved crystalline quality of wide bandgap semiconducting nitrides precisely where it is needed most – in the active region of a vertical conduction device. The NRL technique, shown schematically above, is applicable to a wide range of substrates and uses a dielectric mask to confine epitaxial growth to a vertical column.

AlSb/InAs High Electron Mobility Transistors

NRL has developed materials growth and fabrication technology for the manufacture of high-speed, low power AlSb/InAs high electron mobility transistors (HEMTs) that exhibit state-of-the-art low-power performance. This technology includes the use of an InAlAs/AlSb barrier layer to reduce gate leakage current and a Pd/Pt/Au ohmic contact metallization, which enables ultra-low contact resistance.

SiC Epitaxial Layers with Low Basal Plane Dislocation Concentrations

NRL has developed a process for manufacturing silicon carbide epiwafers with low basal plane dislocation (BPD) concentration that saves time and resources on the production line by relying on epitaxial growth interrupts. The reduction of BPDs relies on the conversion of BPDs to threading edge dislocations (TEDs) at each growth interrupt and the use of multiple interrupts to achieve a desired overall BPD reduction. The interrupted/modified epitaxial growth technique relies on straight forward in situ growth process that may be easy to implement with commercial epitaxial growth systems.

Stop-Rotor Rotary Wing Aircraft

NRL has developed a patented system and method of transitioning an aircraft between helicopter and fixed wing flight modes. The stop rotor aircraft is capable of both a helicopter mode vertical takeoff and landing (VTOL) and efficient high speed fixed wing flight by flipping the left wing/rotor blade 180 degrees between flight modes. Conversion between flight modes will take about 1-2 seconds and simulations indicate altitude deviations of less than 50 feet.

3D Microfabrication of Beam Tunnels for High Power Vacuum Electronic Devices

NRL has developed a novel microfabrication process for creating highly precise, geometrically round tunnels in all-metal, photolithographically-formed structures for the purpose of transporting electron beams through vacuum electro-magnetic slow-wave circuits in the millimeter wave (mmW) and sub-mmW frequency ranges (approx. 90 GHz to over 1 THz).

NRL's Magnetically Attracted Fluid System (Code 8230). The system allows fluid transfer in conditions where the host and target systems are moving independent of each other at unknown and uncontrolled relative rates. Magnetically Attracted Fluid Transfer System

NRL in partnership with the Defense Advanced Research Projects Agency (DARPA) have developed a new system where a refueling vehicle can be operated autonomously or remotely to fuel a vehicle with a magnetically coupled rapid-breakaway fuel transfer system. The system provides a self-aligning magnetic connection between the host system and a target system. The magnetic connection includes a transferrable puck that the host system manually or autonomously attaches to a target vehicle’s fuel receptacle. Enhancing the system with a controllable electromagnet, it can directly control when the puck is transferred or if a connection should be maintained during refueling. The magnetic connection differential allows the puck to connect to the target system, and in the case of a jolt to the system, the magnetic connection will be lost to the host system while the puck remains connected with the target.

The US Navy has developed a dry process technique (above) to transfer large areas of graphene films to a variety of handle substrates Graphene Films and Method for Transfer

NRL has developed an innovative technique to transfer graphene sheets from one substrate to another via the use of thermal release tape. The technique enables clean and crackless graphene transfer for large scale device production. The size of the graphene film transferred is limited only by the available dimensions of the transfer tape.

The NRL approach is amenable to use on a variety of handle substrates as appropriate for the specific device application. The flexibility of the approach has been demonstrated through the transfer of large-area epitaxial graphene films from C-face SiC donor substrates to SiO2 on Si, p- and n-type metal organic chemical vapor deposition (MOCVD) GaN, and thin atomic layer deposition (ALD) Al2O3 handle substrates.

Folded 3D resonator patterns on Kapton Fabrication of 3-Dimensional Micro-Assemblies by Laser Origami

The Naval Research Laboratory (NRL) has developed a method to generate self-folding 3D structures on low-temperature substrates through the controlled out-of-plane folding of arbitrary 2D designs using laser direct-write (LDW) techniques. The invention uses a single laser tool to print 2D patterns, deposit an actuating layer, and provide controlled activation of each actuation layer to trigger the folding of single or arrayed micro-assemblies.

Epitaxial Liftoff and Transfer of III-N Material and Devices

The US Naval Research Laboratory (NRL) has developed an innovative technique to release and transfer III-N material and devices. By using a thin sacrificial film of hexagonal Nb2N or Ta2N, which have lattice constants matched to SiC, III-N heterostructure material can be grown, processed into devices, and then released with a selective XeF2 dry etch. Transfer of III-N devices to alternative substrates can lead to substantial cost and performance improvements.