Institute for Nanoscience
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    Institute for Nanoscience



Opened in 2003, the Institute for Nanoscience conducts innovative, multidisciplinary research at the intersections of the fields of materials, electronics, and biology in the nanometer size domain. The laboratory serves as NRL’s nucleus of collaborative activity in this rapidly evolving research area. Current research programs emphasize cross-division efforts in nanomaterials, nanoelectronics, and nanosensors/devices.

The central core of this major facility is a 5,000 square-foot Class 100 fabrication clean room outfitted with tools to permit lithographic fabrication, measurement, and testing of devices. The equipment includes deposition systems for metals and insulators, optical mask aligners, and etching systems. The lithography effort is supported by chemistry stations and fume hoods for spinning on photo resists, baking, and developing the patterns that ultimately result in small devices and circuits.

The building also includes 5,000 square-foot of controlled-environment laboratory space (12 laboratories) available to NRL researchers whose experiments are sufficiently demanding to require this space. These laboratories all provide shielding from electromagnetic interference and very low floor vibration and acoustic levels. In addition, eight laboratories control the temperature to within 0.5 degrees Celsius and four to within 0.1 degrees Celsius..

  • Fluorescence Lifetime Microscopy Facility
  • E-Beam Metrology Laboratory
  • Scanning Electron Microscope    
  • Transmission Electron Microscope Laboratory
  • Nanofabrication Class 100 Clean Room    
  • Dip-Pen Nanolithography    
  • Focused Ion Beam    
  • Multiprobe STM Instrument Lab    
  • Atomic Force Microscope​
  • Nanoassembly
  • Nano-Optics
  • Nanochemistry    
  • Nanoelectronics
  • Nanomechanics